1101-Nano- and Microfabrication-51026

Registration：Now ~ Any Time
Course Period：2021-09-13 ~ 2022-01-31

• 1101奈微系統製程
• 奈微系統製程_課程說明
• W01_An_Overview
• W02_Diffusion_Oxidation
• W03_Ion_Implant
• W04_Rapid Thermal Process
• W05_Lithography
• W06_Advanced Lithography
• W07_Etching
• W08_MIDTERM_REVIEW
• W10_Physical Deposition
• W11_Chemical Deposition
• W12_Epitaxial Growth
• W13_Isolation, Contacts, and Metallization
• W14_Transistor
• W15_MEMS
• W16_Transducers
• 1101奈微系統製程_成績表_PUB